References in Automation and Semi-conductor Technology

Wafer Handling System

 

Fig.: Wafer Handling System (Brooks Automation GmbH)
Wafer Handling System (Brooks Automation GmbH)

 

Function

Wafer Handling System as modul for the handling and inspection of 300mm-wafers during the production process

Production Steps by OLPE

Precision assembly, comissioning and inspection under clean room conditions(clean room category 10.000), final cleaning (clean room category 100)